RS for Clean Rooms RR for Clean Rooms
The body is made of electroless nickel-plated die-cast aluminum, the main internal components are of stainless steel, and the diaphragm is of fluororubber, thereby minimizing dust generation. Uses pneumatic relays to enable remote control; its basic characteristics are the same in performance as the RS series.
RP for Clean Rooms RA for Clean Rooms
Valves with the body of electroless nickel-plated die-cast aluminum, the diaphragm of fluororubber, and the gas-contact part of oil-free construction. Compact reducing valves with the body of electroless nickel-plated die-cast aluminum, the diaphragm of fluororubber, and the gas-contact part of oil-free construction.
VR for Clean Rooms VC for Clean Rooms
Valves of high-precision relief characteristics with the body of stainless steel and the pressure cell of BF diaphragm. Valves with the body of stainless steel, and the sealing materials that can be changed according to applications.