| RS for Clean Rooms |
RR for Clean Rooms |
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The body is made of electroless nickel-plated die-cast aluminum, the main internal components are of stainless steel, and the diaphragm is of fluororubber, thereby minimizing dust generation. |
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Uses pneumatic relays to enable remote control; its basic characteristics
are the same in performance as the RS series. |
| RP for Clean Rooms |
RA for Clean Rooms |
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Valves with the body of electroless nickel-plated die-cast aluminum, the diaphragm of fluororubber, and the gas-contact part of oil-free construction. |
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Compact reducing valves with the body of electroless nickel-plated die-cast
aluminum, the diaphragm of fluororubber, and the gas-contact part of oil-free
construction. |
| VR for Clean Rooms |
VC for Clean Rooms |
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Valves of high-precision relief characteristics with the body of stainless
steel and the pressure cell of BF diaphragm. |
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Valves with the body of stainless steel, and the sealing materials that
can be changed according to applications. |